There were a few tense moments at the end, but Roger Federer moved safely into the semifinals of the MercedesCup in Stuttgart on Friday, serving up a 6-4, 6-4 quarterfinal victory over Guido Pella.

If Federer reaches the final of the 250-level grass-court event this week, he’ll return to No. 1.

Two days earlier, playing his first match in two and a half months, Federer lost the first set but found his groove just in time to make it past Mischa Zverev, 3-6, 6-4, 6-2. And the momentum he built in the second half of that match seemed to carry into this one as he held his first nine service games without even facing break point, and broke Pella once per set for a chance to serve for the match at 6-4, 5-4.

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Things got a little dicey in that last service game, though—he fell behind double break point at 15-40—but he battled back to deuce, served up an ace to get to match point and swiftly closed it out.

“I thought I was in good control today,” Federer told ATPWorldTour.com after the match.

“I didn’t give Guido many chances to get into my service games, except maybe the last couple.”

Federer’s win over the Argentine extended his grass-court winning streak to 14 matches in a row—he went 5-0 to win Halle last year, 7-0 to win Wimbledon a few weeks later, and he’s now 2-0 this week.

Awaiting the No. 1-seeded Federer in the semifinals will be No. 4 seed Nick Kyrgios, who battled past No. 6 seed Feliciano Lopez in an hour and 22 minutes in the next match on center court, 6-4, 4-6, 6-3. Almost one in four points in the match—33 of 144—were aces, Kyrgios hitting 20 aces and Lopez 13.

Federer and Kyrgios’ only two previous meetings were about as close as could be. Kyrgios saved two match points to win their first meeting on the clay of Madrid in 2015, 6-7 (2), 7-6 (5), 7-6 (12), while Federer won their second meeting on the hard courts of Miami in 2017, 7-6 (9), 6-7 (9), 7-6 (5).

This will be Federer and Kyrgios’ first meeting on grass.

If Federer wins his next match to reach the final, he’ll take No. 1 back from Rafael Nadal and begin his sixth stint (and 310th career week) atop the ATP rankings.